| 硅压阻式压力传感器非线性误差校正方法 |
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| 引用本文： | 蒋小燕,徐大诚,杨成,谢维钦,王文襄. 硅压阻式压力传感器非线性误差校正方法[J]. 传感器与微系统, 2006, 25(1): 76-78,84 |
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| 作者姓名： | 蒋小燕 徐大诚 杨成 谢维钦 王文襄 |
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| 作者单位： | 1. 苏州大学,电子信息学院,江苏,苏州,215021
2. 昆山双桥传感器测控技术有限公司,江苏,昆山,215325 |
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| 摘 要： | 利用ZMD31020传感器信号处理器,实现了硅压阻式传感器的非线性及温度补偿。通过软件输入预先设定的数字量给ZMD31020处理器的存贮空间,可实现硅压阻式压力传感器(PRT)的零点输出、热零点漂移、满量程输出、热灵敏度漂移和非线性的高精度校准和补偿。传感器的输出精度达到了0.275%。
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| 关 键 词： | 压阻式压力传感器 信号调理 软件补偿 |
| 文章编号： | 1000-9787（2006）01-0076-03 |
| 收稿时间： | 2005-06-21 |
| 修稿时间： | 2005-06-21 |
Nonlinear errors correcting method of piezoresistive pressure transducer |
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| JIANG Xiao-yan,XU Da-cheng,YANG Cheng,XIE Wei-qin,WANG Wen-xiang. Nonlinear errors correcting method of piezoresistive pressure transducer[J]. Transducer and Microsystem Technology, 2006, 25(1): 76-78,84 |
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| Authors: | JIANG Xiao-yan XU Da-cheng YANG Cheng XIE Wei-qin WANG Wen-xiang |
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| Abstract: | The ZMD31020 is a special sensor signal processor optimized for piezoresistive sensor nonlinearity and temperature compensation.The preestablished digital quantities are inputted to ZMD31020 locations by software.The zero point output,thermal zero shift,full-scale output,thermal sensitivity shift and nonlinearity of piezoresistive pressure transducer(PRT) are compensated and calibrated precisely.The sensor output error is achieved to(0.275 %) by error analysis. |
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| Keywords: | piezoresistive pressure transducer(PRT) signal conditioning software compensation |
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