The influence of electric-field bending on the nonlinearity ofcapacitive sensors

Three-layered electrode structures are often employed in multiple-electrode capacitive position sensors. Even when advanced algorithms and well-designed guarding electrodes are used, the electric-field-bending effect is still one of the major contributors to the nonlinearity of capacitive position sensors. In this paper, the effects of electric-field bending on linearities of five capacitive linear-position sensors have been studied based on a physical model of the capacitive sensor. It is shown that the effect of electric-field bending on linearities strongly depends on the sensor structures, and that it is significantly reduced when advanced sensor structures and algorithms are used. The results are very useful for optimizing the sensor structure according to its application