The Effect of Substrate Material and Postannealing on the Photoluminescence and Piezo Properties of DC-Sputtered ZnO |
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| Authors: | Leo P Schuler Nagarajan Valanoor Paul Miller Ian Guy Roger J Reeves Maan M Alkaisi |
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| Affiliation: | (1) MacDiarmid Institute for Advanced Materials & Nanotechnology, University of Canterbury, Christchurch, New Zealand;(2) Department of Electrical and Computer Engineering, University of Canterbury, Christchurch, New Zealand;(3) Department of Physics and Astronomy, University of Canterbury, Christchurch, New Zealand;(4) School of Materials Science and Engineering, University of New South Wales, Sydney, NSW, 2052, Australia;(5) Department of Physics, Macquarie University, Sydney, NSW, 2109, Australia |
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| Abstract: | Abstact Zinc oxide (ZnO) thin films were deposited on various substrates by DC sputtering deposition. Thermal annealing was performed
at up to 1,200°C in N2 for 30 min. The effect was investigated using x-ray diffraction (XRD), photoluminescence (PL) spectra, scanning electron
microscopy (SEM), and piezoresponse force microscopy (PFM). The influence on PL response depends both on substrate material
and annealing temperature. The PFM images reveal that the ZnO films have inversion domains. While annealing improves the piezoresponse,
the inversion domains still persist. The cross-sectional analysis of the inversion domains shows domain boundary widths of
approximately 1.5 nm.
(Received ...; accepted ...) |
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| Keywords: | DC magnetron sputtering multiple substrate annealing silicon sapphire fused silica glass piezoresponse force microscopy (PFM) photoluminescence (PL) |
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