| 特种气体输送系统安全运行探讨 |
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| 引用本文： | 杨敏杰.特种气体输送系统安全运行探讨[J].广州化工,2012,40(11):239-241. |
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| 作者姓名： | 杨敏杰 |
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| 作者单位： | 深圳方正微电子有限公司,广东深圳,518116 |
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| 摘 要： | 论述了特气的性质及分类,对特气输送系统的主要构成单元:尾气处理器、特气气柜/气架、特气分配箱/分配盘、输送管线和特气监控/侦测系统的功能和用途进行了介绍,为避免特气输送系统出现泄漏,对特气系统日常安全运行管理和特气泄漏应急处理提出了建议。
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| 关 键 词： | 特气 输送 监控 管理 |
Discussion on the Safety Operation of the Specialty Gas Supply System |
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| YANG Min-jie.Discussion on the Safety Operation of the Specialty Gas Supply System[J].GuangZhou Chemical Industry and Technology,2012,40(11):239-241. |
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| Authors: | YANG Min-jie |
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| Affiliation: | YANG Min -fie (Shenzhen Founder Microelectronics Co. , Ltd. , Guangdong Shenzhen 518116, China) |
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| Abstract: | Properties and classifications of the specialty gas, and the functions and purposes of the main components of specialty gas supply system were introduced, including scrubber, GC/GR, VMB/VMP, gas supply pipeline and GMS/ GDS. Some suggestions on daily safety operation management and emergency procedures were put forward to prevent spe- cialty gas leakage. |
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| Keywords: | specialty gas supply monitoring management |
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