Pyrolysis of Poly(isopropyliminoalane) to Aluminum Nitride |
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| Authors: | Yasuo Saito Yoshiyuki Sugahara Kazuyuki Kuroda |
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| Affiliation: | Department of Applied Chemistry, School of Science and Engineering, Waseda University, Tokyo 169-8555, Japan;Research Laboratory for Energy, Environments, and Synthetic Materials, School of Science and Engineering;Waseda University, Tokyo 169-8555, Japan, and Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, Tokyo 169-0051, Japan |
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| Abstract: | The pyrolysis processes of poly(isopropyliminoalane) ((HAlN i Pr) n ) were investigated, using mass spectrometry to analyze the gases and infrared spectroscopy to analyze the residual solids. The major mass loss (in the temperature range of 240°–540°C) consisted of two different pyrolysis stages. At the first stage (240°–320°C), (HAlN i Pr)6 was detected continuously as a gas, and the precursor was converted to a cross-linked structure. A polymerization mechanism without a release of organic compounds has been proposed, and the formation of (HAlN i Pr)6 during polymerization (besides its evaporation) has been suggested. The second stage (320°–560°C) involved the formation of various organic compounds, and radical processes for their formation were proposed. |
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| Keywords: | aluminum nitride pyrolysis precursors |
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