流体对MEMS矢量水听器共振频率的影响

由中北大学研制的MEMS仿生矢量水听器具有低频、灵敏度高等性能特点,但是由于流体的影响,水听器微结构在空气中的共振频率与液体中不同,为此研究了流体对MEMS矢量水听器共振频率的影响。首先,理论上分析了流体对共振频率的影响。然后,采用ANSYS对空气中和液体中MEMS矢量水听器的共振频率进行仿真。最后分别采用振动台和矢量水听器校准系统进行了测试。结果表明MEMS矢量水听器在水中的共振频率较空气中下降了约31.2%。

Influence of Fluid on the Resonance Frequency of MEMS Vector Hydrophone

The MEMS bionic vector hydrophone developed by North University of China has advantages of low frequency, miniaturization, high sensitivity, etc. However, the resonance frequency of hydrophone microstructure in air is different to that in the liquid because of the influence by the fluid. Therefore, the research that how the fluid influences the resonance frequency of the MEMS bionic vector hydrophone is indispensable. First, this paper theoretically analyzes the influence of fluid on resonant frequency of the vector hydrophone.Then ,the resonance frequency of the hydrophone in air and the liquid is simulated by ANSYS .The hydrophone is measured by using a shaking table and a vector hydrophone calibration system respectively. Results show that the resonance frequency of the MEMS bionic vector hydrophone in the liquid fell 31.2% compared with that in air.