| 一种新型溶胶-凝胶方法制备ZnO薄膜的椭圆偏振光谱研究 |
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| 引用本文： | 唐利斌, 郑云, 吴刚, 姬荣斌, 宋炳文, 黄晖. 一种新型溶胶-凝胶方法制备ZnO薄膜的椭圆偏振光谱研究[J]. 红外技术, 2006, 28(1): 7-11. DOI: 10.3969/j.issn.1001-8891.2006.01.002 |
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| 作者姓名： | 唐利斌 郑云 吴刚 姬荣斌 宋炳文 黄晖 |
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| 作者单位： | 昆明物理研究所,云南,昆明,650223;昆明物理研究所,云南,昆明,650223;昆明物理研究所,云南,昆明,650223;昆明物理研究所,云南,昆明,650223;昆明物理研究所,云南,昆明,650223;昆明物理研究所,云南,昆明,650223 |
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| 基金项目： | 云南省自然科学基金;云南省自然科学基金 |
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| 摘 要： | 使用一种新型的溶胶-凝胶方法制备了ZnO薄膜,此方法的特点在于操作简单、无毒、实用.此方法可在非单晶基片(如玻璃、石英等)上制备最大晶粒尺寸大于100 nm的大面积ZnO薄膜.利用椭圆偏振光谱观察到了所制备ZnO薄膜折射率随光子能量的增加在光子能量等于禁带宽度处出现峰值的现象;计算了ZnO薄膜的光学带隙;证明了ZnO薄膜中存在由氧空位和锌间隙原子在带隙中引入的缺陷能级.
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| 关 键 词： | ZnO薄膜 溶胶-凝胶 椭圆偏振光谱 |
| 文章编号： | 1001-8891（2006）01-0007-05 |
| 收稿时间： | 2005-11-21 |
| 修稿时间： | 2005-11-21 |
Ellipsometry Study on the ZnO Thin Film Prepared by A Novel Sol-Gel Method |
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| TANG Li-bin, ZHENG Yun, WU Gang, JI Rong-bin, SONG Bing-wen, HUANG Hui. Ellipsometry Study on the ZnO Thin Film Prepared by A Novel Sol-Gel Method[J]. Infrared Technology , 2006, 28(1): 7-11. DOI: 10.3969/j.issn.1001-8891.2006.01.002 |
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| Authors: | TANG Li-bin ZHENG Yun WU Gang JI Rong-bin SONG Bing-wen HUANG Hui |
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| Affiliation: | Kunming Institute of Physics, Yunnan Kunming 650223, China |
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| Abstract: | A new Sol-Gel technique to prepare ZnO solid thin film was suggested, the characteristics of this technique are simple, nontoxic, practical. The technique may prepare the large-area ZnO thin film with the largest crystal size bigger than 100 nm on non single crystal substrates such as glass and silica. By means of Ellipsometry technique the authors have observed a peak value of refractive index when photon energy equals the energy of bandgap width, calculated the optical band gap of the prepared ZnO solid thin film and proved the defect energy level, which is caused by the presence of oxygen vacancy and interstitial zinc atom in the ZnO solid thin film. |
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| Keywords: | ZnO Thin Film Sol-Gel Ellipsometry |
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