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成型工艺对高介薄型单层陶瓷电容器电阻性能影响
引用本文:黎俊宇,钟朝位,张旭.成型工艺对高介薄型单层陶瓷电容器电阻性能影响[J].真空电子技术,2014(5):30-33.
作者姓名:黎俊宇  钟朝位  张旭
作者单位:电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054
基金项目:国防科工局军品协作配套科研项目资助
摘    要:采用流延和轧膜成型两种工艺制作了尺寸为38.1mm×38.1mm×0.15mm,介电常数为25000左右的单层微波电容用陶瓷介质基片。系统对比了两种不同成型工艺对该基片的显微结构和电阻性能的影响规律。实验结果表明.轧膜成型制备出的电容器样品的绝缘电阻偏压特性和温度特性均优于流延成型工艺制得的样品,而且在各个温度下的介电损耗低于流延成型工艺制得的样品。不同的陶瓷基片表面扫描电镜图显示,流延成型的陶瓷介质表面粗糙多孔,而轧膜成型的陶瓷介质表面致密紧实。

关 键 词:成型工艺  陶瓷电容器  SrTiO3  绝缘电阻  偏压特性  温度特性

Influences of Forming Processon the Resistance Characteristics of Thin Single-Layer Ceramic Capacitors with High Permittivity
LI Jun-yu,ZHONG Chao-wei,ZHANG Xu.Influences of Forming Processon the Resistance Characteristics of Thin Single-Layer Ceramic Capacitors with High Permittivity[J].Vacuum Electronics,2014(5):30-33.
Authors:LI Jun-yu  ZHONG Chao-wei  ZHANG Xu
Affiliation:(State Key Lab. of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China)
Abstract:Single-layer microwave ceramic capacitor dielectric substrate with size of 38.1 mm X 38.1 mm N0.15 mm and permittivity of 25000 was prepared by two different kinds of forming process including tape-casting forming process and roll forming process. The effect of two different kinds of forming process on the microstructure and resistance properties of ceramiccapacitor was systematically comparative studied. The experimental results show that the insulation resistance bias characteristics and temperature character- istics of the capacitor samples prepared by roll forming process are better than that prepared by tape-cast- ing forming process. The dielectric loss in each temperature is less than that of the capacitor samples pre- pared by tape-casting forming process as well. The SEM images of the surface of the different ceramic sub- strates show that the surface of the ceramic substrate samples prepared by the tape-casting forming process was rough and porous. On the contrary, the surface of the ceramic substrate samples prepared by roll forming process was flat and compact.
Keywords:Forming process  Ceramic capacitors  SrTiO3  Insulation resistance  Bias characteristics  Temperature characteristics
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