| 高纯细晶A12O3陶瓷金属化工艺研究 |
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| 引用本文： | 陈丽梅,;黄亦工,;张巨先.高纯细晶A12O3陶瓷金属化工艺研究[J].真空电子技术,2014(5):76-80. |
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| 作者姓名： | 陈丽梅 ;黄亦工 ;张巨先 |
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| 作者单位： | [1]北京真空电子技术研究所,北京100015; [2]大功率微波电真空器件技术国防科技重点实验室,北京100015 |
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| 摘 要： | 本文主要从金属化配方、涂膏方法、金属化层的厚度、金属化温度和镍层的厚度等工艺角度对高纯、细晶Al2O3陶瓷的封接性能进行研究和分析。其结果显示，采用高Mo含量的金属化膏剂、丝网印刷的涂膏方法、金属化层的厚度约为20pm、在1450℃下烧结，镍层的厚度5μm左右时，其平均抗拉强度可达143MPa，超出行业标准50％以上，其显微结构更加连贯、均匀、致密。
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| 关 键 词： | 高纯细晶Al2O3陶瓷 抗拉强度 显微结构 金属化层 |
Research on Metallization Process for High-Purity and Fine-Gained Al2O3 Ceramics |
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| Affiliation: | CHEN Li-mei , HUANG Yi-gong , ZHANG Ju-xian( 1. Beijing Vacuum Electronics Research Institute, Beijng 100015, China ; 2. Vacuum Electronics National Laborarory, Beijing 100015,China) |
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| Abstract: | In this paper, by changing metallization formula, coating technique, thickness of metalling layer, sintering temperature, and the nickel thickness, the effects of metallization process on the ceramicmetal sealing property of high-purity and fine-grained Al2O3 ceramics are analyzed. The resultsindicate thatusing high Mo content as formula, using screen printing coating technique, setting metallizedthickness to be about 20 μm, sinteringat 1450℃, and setting nickel thickness to be about 5 μm, the average ten- silestrength of the standard A12O3 is up to 143 MPa, which is 50%higher than the industry standard values. The microstructure of the metallized coating is more coherent, uniform, and compact. |
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| Keywords: | High-purity and fine-grained Alz Oa ceramics Sealing strength Microstructure Metallizedlayer |
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