Synthesis and Microstructural Characterization of Unsupported Nanocrystalline Zirconia Thin Films

A polymeric precursor spin-coating technique is illustrated in which yttrium-stabilized zirconia (YSZ) thin films are produced on Si, Al₂O₃, and NaCl at temperatures less than 350°C. High-resolution transmission electron microscopy (HRTEM) examinations show that the YSZ films are nanocrystalline (grain size of less than 5 nm), fully dense, and have a stabilized cubic fluorite structure. Using the polymeric precursor spin coating method, unsupported nanocrystalline thin films of YSZ with thicknesses ranging from 30 to 1000 nm are prepared by transferring the films from a host substrate to metallic TEM grids with unsupported areas exceeding 1 mm².