金属线宽与间距渐变的片上螺旋电感设计规则研究

在分析片上螺旋电感的磁场分布及射频损耗机制的基础上,研究了电感的金属线宽及线圈间距的变化对电感性能的影响,在大量数值分析基础上提出了金属线宽与间距之和不变,而金属线宽与间距之比从外圈到内圈逐渐减小的渐变型片上螺旋电感,并得到了实验验证,多组样品的测试结果与数值分析结果相吻合,以2.4 GHz频段处为例,在高阻硅衬底上制备的5 nH渐变结构电感的品质因子Q为11,比具有相同外径和电感值的固定金属线宽及间距的传统电感高19.6%.

Layout Optimization of RF Integrated Inductor with Gradually Changed Structure

The performance of RF circuits is affected by that of the on-chip spiral inductors.On-chip inductor with gradually changed layout structure has been presented.In this structure,the sum of metal width and space of each coil is fixed while the ratio of the metal width to space is gradually reduced from outside to inside.Some valuable design rules have been obtained through a large number of data analyses.The experimental results have also corroborated the validity of the proposed method.For example,Q factor o...