用于真空度测量的脉冲磁控放电研究

本文详细讨论了同轴场式脉冲磁控放电真空度测量的有关问题，包括磁控真空计工作过程中的放电行为、产生稳定的磁控放电所必须满足的着火条件、以及稳定放电时离子电流与压强的函数关系。分析表明，当磁场强度大于某一临界值时，磁控放电的离子电流与磁场强度无关；离子电流是压强的幂函数，且与所测真空器件电极的表面状况和几何结构有关。最后本文绘出了若干真空灭弧室真空度的测量实例。

Research on Pulsed Magnetron Discharges for Vacuum Measurement

This paper presents a detailed discussion on some aspacts of pulsed magnetron discharges with coaxial field used for vacuum measurement including discharge behavior,some necessary initial conditions for stable discharges and the function between thepressure and ion current. It is shown that ion current is a power function of pressure,independently of the magnetic field strength, providing the magnetic field is over a critical value. In this case, the ion current is affected by the surface conditionS of electrodes and geometric construction of the device, which is to be measured. Some examples of measurement results for vacuum interrupters are presented by means of the coaxial field and pulsed magnetron discharges.