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GaAs半导体激光器腔面高反射涂层的研究
引用本文:杨晓妍,刘杰.GaAs半导体激光器腔面高反射涂层的研究[J].光学精密工程,1997,5(3):12-15.
作者姓名:杨晓妍  刘杰
作者单位:[1]长春光学精密机械学院光电子一系 [2]中国科学院长春光学精密机械研究所
摘    要:通过对GaAs激光器谐振腔后腔面蒸镀SiO、Au高反射膜工艺过程, 分析涂层特性。反射率由无膜时的32%, 提高到94%以上, 保护了器件端面, 降低阈值电流, 提高激光输出功率和工作寿命。

关 键 词:GaAs激光器  谐振腔  高反射膜  损耗
收稿时间:1997-01-14

The Study of High Reflecting Coatings for GaAs Semiconductor Laser Cavity Surface
Yang Xiaoyan,Liu Jie.The Study of High Reflecting Coatings for GaAs Semiconductor Laser Cavity Surface[J].Optics and Precision Engineering,1997,5(3):12-15.
Authors:Yang Xiaoyan  Liu Jie
Affiliation:1. Chungchun Institute of Optics and Fine Mechanics, Changchun, 130022;2. Chang chun Institute of Optics aml Fine Mechanics, Chinese Academy of Sciences, Changchun, 130022
Abstract:Through the technology process of evaporating Si0 Au high reflecting coatings on GaAs laser back cavity surface, we analysed the coating characteristics. The reflectivity have been increased from 32%, in the case of no coatings, to above 94%.By this, the device cavity surfaces have been protected. The laser output power and working lifetime have been enhanced.
Keywords:GaAs lasers  High reelecting coatings  Resonant cavities  Loss
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