9.77 μm激光器零级耦合输出选频振荡光栅的设计和研制

建立了实际刻划光栅的物理模型，给出了相应的衍射效率表达式，进而阐述了红外激光器零级耦合输出选频振荡闪耀光栅的设计原理。根据理论分析结果，采用调整刻划负载控制三角槽形闪耀光栅零级面。双向逐步逼近1级和零级衍射效率设计值的方法和工艺，研制了在利特罗(Littrow)安装下1级衍射效率为86．5％，零级衍射效率为10．3％的9．77μm红外激光器零级耦合输出选频振荡镀金闪耀光栅。检验结果表明，由加工误差引入的1级和零级衍射效率与设计中心值的偏离量分别仅为0．6％和3％。

Design and Manufacture for Select Frequency Oscillation Grating in the Zero-Order Coupling Output of 9.77 μm Laser

The physical model of real ruled grating is proposed, the corresponding expression of diffraction efficiency is given, and design principle of blazed grating for frequency-selection oscillation in zero\|order output for an infrared (IR) laser is introduced. On the base of the result of theory analysis, the technologies are adopted that adjusting the ruled load to control the zero-order plane of the grating and bi-directionally gradually approach the design value of the diffraction efficiencies of the zero-order and first-order, the gilt blazed grating is made with the first-order diffraction efficiency of 86.5% and the zero-order diffraction efficiency of 10.3% in Littrow form. The testing result shows that the deviations of the zero-order and first-order diffraction efficiency from the designed central value are only 0.6% and 3%, respectively.