| 激光合成波长干涉仪的准直方法研究 |
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| 引用本文： | 魏若飞,严利平,姚喜国,杨涛,陈本永.激光合成波长干涉仪的准直方法研究[J].浙江理工大学学报,2011,28(4). |
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| 作者姓名： | 魏若飞 严利平 姚喜国 杨涛 陈本永 |
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| 作者单位： | 浙江理工大学纳米测量技术实验室,杭州,310018 |
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| 摘 要： | 对激光合成波长干涉仪的准直方法进行研究.提出采用四象限探测器实现激光合成波长干涉仪的准直方法,描述激光合成波长干涉仪的准直原理与信号处理方法；对参考角锥棱镜进行准直测量实验,实验结果表明:在x方向所测数据的标准偏差从7.038 mV减小到1.6 mV,在z方向所测数据的标准偏差从30.118 mV减小到1.119 mV；对测量角锥棱镜进行准直测量实验,实验结果表明:在x方向所测数据的标准偏差从3.204 9 mV减小到1.202 mV,在y方向所测数据的标准偏差从2.831 231 mV减小到0.673 mV.验证了所用准直方法的可行性和实用性.
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| 关 键 词： | 激光干涉仪 准直 四象限探测器 |
Study on Alignment Method of a Laser Synthetic Wavelength Interferometer |
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| WEI Ruo-fei,YAN Li-ping,YAO Xi-guo,YANG Tao,CHEN Ben-yong.Study on Alignment Method of a Laser Synthetic Wavelength Interferometer[J].Journal of Zhejiang Sci-tech University,2011,28(4). |
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| Authors: | WEI Ruo-fei YAN Li-ping YAO Xi-guo YANG Tao CHEN Ben-yong |
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| Affiliation: | WEI Ruo-fei,YAN Li-ping,YAO Xi-guo,YANG Tao,CHEN Ben-yong(Nanometer Measurement Laboratory,Zhejiang Sci-Tech University,Hangzhou 310018,China) |
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| Abstract: | The alignment method of the laser synthetic wavelength interferometer is studied.A method for the alignment of the laser synthetic wavelength interferometer is proposed by using a four-quadrant detector.The alignment principle of the laser synthetic wavelength interferometer and the signal processing method are described.The alignment measuring experiment of the reference corner cube is carried out.The experimental result shows that the standard deviations are reduced from 7.038 mV to 1.6 mV in the directio... |
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| Keywords: | laser interferometer alignment four-quadrant detector(QD) |
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