Shock-wave Processes in the Electric Explosion of Thin-Film Systems on Silicon |
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| Authors: | Skvortsov Arkady A. Varlamov Dmitriy O. Nikolaev Vladimir K. Volodina Olga V. Skvortsova Anna A. |
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| Affiliation: | 1.Physics and Mathematics, Department of Dynamics and Strength of Machines and Materials, Moscow Polytechnic University, Moscow, Russia
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| Abstract: | Silicon - This study investigates the relationship between thermal shocks on the surface of semiconductor wafers and parameters of thermostimulated mechanical vibrations to develop express methods... |
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