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| Effects of the electric field at the edge of a substrate to deposit a Ø100 mm uniform diamond film in a 2.45 GHz MPCVD system | |
| 作者姓名： | Kang AN (安康) Shuai ZHANG (张帅) Siwu SHAO (邵思武) et al. |
| 基金项目： | This work was sponsored by National Key Research and Development Program of China (No. 2019YFE03100200), National Natural Science Foundation of China (No. 5210020483), Postdoc Research Foundation of Shunde Graduate School of University of Science and Technology Beijing (No. 2020BH015) and Fundamental Research Funds for the Central Universities (No. FRF-MP-20-48). The authors are very grateful for their financial support. |
| 摘 要： | |
| 收稿时间： | 2021-08-27 |
| 修稿时间： | 2022-01-21 |
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