| 一种增强型的SOLR校准方法 |
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| 引用本文： | 吴爱华,王一帮,霍晔,梁法国,刘晨,栾鹏,陈晓华,王海. 一种增强型的SOLR校准方法[J]. 计量学报, 2022, 43(8): 973-978. DOI: 10.3969/j.issn.1000-1158.2022.08.01 |
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| 作者姓名： | 吴爱华 王一帮 霍晔 梁法国 刘晨 栾鹏 陈晓华 王海 |
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| 作者单位： | 中国电子科技集团公司第十三研究所,河北石家庄050051;西安电子科技大学,陕西西安710071;中国电子科技集团公司第十三研究所,河北石家庄050051;西安电子科技大学,陕西西安710071 |
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| 摘 要： | 提出了一种增强型的在片SOLR校准方法(eSOLR),结合无需定义的直通传输线标准,2对对称的反射标准(开路标准、短路标准)和1对准确定义的负载标准,实现微波毫米波频段的校准测试。详细给出了8项误差模型的求解过程,同时采用校准比较算法对商用校准方法和eSOLR进行了验证。实验结果表明,eSOLR优于现有的商用SOLT、LRRM校准方法。0.2～110GHz陶瓷衬底的无源失配衰减器验证件测量结果表明,新方法S11测量结果更加连续,测量结果与多线TRL更为吻合。
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| 关 键 词： | 计量学 在片散射参数 校准 SOLR 校准标准定义 无源器件 |
| 收稿时间： | 2022-04-24 |
An Enhanced SOLR Calibration Method |
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| WU Ai-hua,WANG Yi-bang,HUO Ye,LIANG Fa-guo,LIU Chen,LUAN Peng,CHEN Xiao-hua,WANG Hai. An Enhanced SOLR Calibration Method[J]. Acta Metrologica Sinica, 2022, 43(8): 973-978. DOI: 10.3969/j.issn.1000-1158.2022.08.01 |
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| Authors: | WU Ai-hua WANG Yi-bang HUO Ye LIANG Fa-guo LIU Chen LUAN Peng CHEN Xiao-hua WANG Hai |
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| Affiliation: | 1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang,Hebei 050051, China
2. Xidian University, Xi’an, Shaanxi 710071, China |
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| Abstract: | An enhanced SOLR(eSOLR) calibration method for solving the 8-term errors model in an on-wafer test system is introduced. The proposed new method requires one undefined Thru, two pairs of undefined symmetrical Reflects (Open-Open and Short-Short) and a pair of known Loads. 8-term error terms are derived in detail. Calibration comparison method was carried out between commercial calibration methods and eSOLR. The result showed that eSOLR was more accuracy than SOLT and LRRM. The calibration method has been tested on a mismatched attenuator for the frequency range between 0.2GHz and 110GHz. Compared with the existing calibration methods, the new method shows the attenuator’s S11 is more consecutive and S21 more closer to the Multiline TRL. |
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| Keywords: | metrology on-wafer scattering parameter calibration SOLR definition for calibration standard passive components |
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