Investigation of MEMS Piezoresistive Pressure Sensor with a Freely Supported Rectangular Silicon Carbide Diaphragm as a Primary Sensing Element for Altitudinal Applications |
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| Authors: | Kanekal Dadasikandar Jindal Sumit Kumar |
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| Affiliation: | 1.School of Electronics Engineering, Vellore Institute of Technology, Vellore, Tamilnadu, 632014, India
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| Abstract: | Silicon - Silicon and Polysilicon are used as piezoresistive materials in MEMS (Micro Electromechanical system) piezoresistive pressure sensors because of its reproducibility and enhanced... |
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