A novel self-aligned fabrication process for microwave static induction transistors in silicon carbide |
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Authors: | Henning JP Przadka A Melloch MR Cooper JA Jr |
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Affiliation: | OptoLynx Inc., West Lafayette, IN, USA; |
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Abstract: | A novel multiple-self-aligned fabrication process is developed for recessed gate microwave static induction transistors (SITs) in silicon carbide (SiC). This process is demonstrated by fabricating 4H-SiC SITs having record f/sub T/ of 7 GHz. |
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