A novel self-aligned fabrication process for microwave static induction transistors in silicon carbide |
| |
Authors: | Henning J.P. Przadka A. Melloch M.R. Cooper J.A. Jr. |
| |
Affiliation: | OptoLynx Inc., West Lafayette, IN, USA; |
| |
Abstract: | A novel multiple-self-aligned fabrication process is developed for recessed gate microwave static induction transistors (SITs) in silicon carbide (SiC). This process is demonstrated by fabricating 4H-SiC SITs having record f/sub T/ of 7 GHz. |
| |
Keywords: | |
|
|