| 基于反射谱的GaN薄膜厚度在线测量系统 |
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| 引用本文： | 张永刚. 基于反射谱的GaN薄膜厚度在线测量系统[J]. 电子质量, 2004, 0(12): 56-57 |
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| 作者姓名： | 张永刚 |
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| 作者单位： | 西安电子科技大学微电子研究所,西安,710071 |
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| 摘 要： | 针对Si衬底不透明而无法采用透射谱测量GaN薄膜厚度问题,应用反射谱测量,同时结合晶体薄膜的干涉效应原理,并考虑到晶体折射率随光子能量变化的因素,从理论上推导出了实用的薄膜厚度计算方法,从而得到实现材料特性的方便表征和MOCVD设备的在线薄膜厚度测量的新途径.
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| 关 键 词： | GaN Si衬底 反射谱 厚度测量 |
| 文章编号： | 1003-0107(2004)12-0056-02 |
A New system to Measure Film Thickness of GaN Online |
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| Zhang Yong-gang. A New system to Measure Film Thickness of GaN Online[J]. Electronics Quality, 2004, 0(12): 56-57 |
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| Authors: | Zhang Yong-gang |
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| Abstract: | For the transmission spectra can not measure film thickness of GaN on Si which is opaque, A mothod using reflection spectra is given .the method uses the interference effect of the crystal film and considers the effect of the refractive index n on the photon wavelength,the result of compute simulation shows that the method is a rapid and precise one for measuring the film thickness of GaN crystals. |
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| Keywords: | GaN |
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