薄膜反射镜静电成形单电极控制

静电拉伸薄膜反射镜是近年来发展起来的一种新型技术，薄膜反射镜具有质量轻、柔韧性好、可折叠等优点，在航天领域具有广阔的应用前景。静电拉伸薄膜反射镜的原理为利用静电场上库仑力作用使薄膜产生面形变化，生成所需的反射曲面。由于薄膜变形力学，以及静电场理论的复杂性，目前薄膜成形及其面形控制的研究工作都还不完善。本文在薄膜反射镜成形控制机理研究的基础上，设计了单电极式薄膜反射镜的控制试验，详细计算了控制成形所需的主要参数，设计了薄膜反射镜的夹持结构和控制电路，并利用刀口仪测量了形成的反射面的焦距，试验结果表明在10000V的高压下可以行程焦距约为2.1m的反射镜面，面形的PV值达到11.14λ, RMS值为1.86λ，通过改善夹持结构和选取性能优良的薄膜材料控制面形精度可进一步提高。

The test design of shape controlled with single electrode Electrostatic about the membrane mirror

The membrane mirror stretched with electrostatic is the new technique developed in recent years, and membrane mirror is very light , good flexibility and Collapsible, it will be used widely in space. membrane mirror was sharped by coulomb force in field of electrostatic, which radius is decided by the distributing of electrostatic field. It is very complexity of membrane transfiguration force and the electrostatic field theory ,so there is much work to do about the control theory and technique on membrane mirror. Based on the Research of shaping Stretched Membrane with Electrostatic Curvature Mirrors, the support structure of membrane mirror and control circuit were designed , and the focus was measured by knife-edge. The result is membrane mirror was stretched in 10000V high voltage and it’s focus is about 2.1m, the PV value is 11.14λ, the RMS value is 11.14λ. The following work will be improving the holding structure and using better performance membrane in order to get better surface precision.