硅基微机械表面粘附及摩擦性能的AFM试验研究

在Si（100）基片上制备了十八烷基三氯硅烷（OTS）分子润滑膜，并用原子力显微镜（AFM）对比研究了施加OTS膜前后的硅表面的粘附、摩擦磨损性能。试验考虑了相对湿度和扫描速度对粘附、摩擦性能的影响。结果表明，相对于硅构件来讲，OTS膜表面粘附力较小，具有较小的摩擦因数，呈现较好的润滑性能；硅构件受湿度变化的影响比OTS膜明显。微构件的摩擦性能由于水合化学作用生成Si（OH）。润滑膜，使得其受相互间运动速度影响很大。OTS膜不仅是一种耐磨性较好的润滑膜，而且有良好的稳定性。

Adhesive and Tribological Properties of Silicon-surface MEMS Investigated with Atomic Force Microscope(AFM)

First,the OTS molecular lubricant films were prepared on Si(1 0 0) substrate,and their adhesive and tribological properties were compared with each other by AFM/LFM.Meanwhile,the effect of relative humidity and scanning velocity was taken into consideration.Also,their durabilities were studied in the last part.The results show that the adhesive force of OTS film is much smaller the one of Si(1 0 0) substrate which leads to a relatively low friction coefficient,thereby the OTS film presents better lubricant performance.Besides,the Si(1 0 0) substrate is much more affected by the variation of humidity than OTS film;The velocity effect on the frictional performance is more significant for Si(1 0 0) component due to the Si(OH)_4 lubricant film caused by the tribochemical reaction.The OTS lubricant film exhibits better wearable and stable comparatively.