| 无定形金刚石膜的光学性质 |
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| 引用本文： | 魏爱香,陈弟虎,彭少麒.无定形金刚石膜的光学性质[J].材料研究学报,1997,11(1):81-84. |
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| 作者姓名： | 魏爱香 陈弟虎 彭少麒 |
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| 作者单位： | 中山大学物理系!广州市，510275，中山大学，中山大学 |
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| 基金项目： | 广东省高教局重点学科基金 |
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| 摘 要： | 采用磁过滤真空溅射离子沉积技术，研究了不同衬底负偏压下制备的样品的吸收光谱和光能隙，用632．8nm的椭圆偏振仪测量了膜的厚度和折射率．结果表明：衬底负偏压Vb在-50—20V范围内制备的样品，其光吸收主要是态的吸收，膜中有较多的SP3组份，光能降为3．1～3．4eV，形成无定形金刚石薄膜（a—D）
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| 关 键 词： | 无定形 金刚石膜 离子技术 吸收光谱 薄膜 |
| 收稿时间： | 1997-02-25 |
| 修稿时间： | 1997-02-25 |
OPTICAL PROPERTIES OF AMORPHOUS DIAMOND FILM |
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| WEI Aixian,CHEN Dihu,PEN Shaoqi.OPTICAL PROPERTIES OF AMORPHOUS DIAMOND FILM[J].Chinese Journal of Materials Research,1997,11(1):81-84. |
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| Authors: | WEI Aixian CHEN Dihu PEN Shaoqi |
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| Affiliation: | Zhongshan University |
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| Abstract: | Amorphous diamond film (a-D) were prepared by deposition from magnetic filtered ions sputtering from graphite. The optical absorption spectra of a-D film deposited in diffrent substrate bias voltage condition were investigated. Thickness and refractive index of film were ellipsometrically measured. It is found that absorption of samples mainly results from a state, Optical band gap is 3.1 -3.4eV and the a-Dfilm with high SP3 fraction can be grown when the bias voltage range from-50V to-20V. |
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| Keywords: | amorphous diamond film ionic technology absorption spectra |
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