电声显微成像和应用

扫描电声显微镜(SEAM)是融现代电子光学技术、电声技术、压电传感技术、弱信号检测和脉冲图像处理以及计算机技术为一体的一种新型无损分析和显微成像工具。其成像机理是基于材料的微观热弹性能或者电学性能的变化，获取目前其他手段无法得到的信息。它可以原位(in situ)同时观察试样的二次电子像和电声像(SEAM)，兼有声学显微术非破坏性内部成像和电子显微术高分辨率快速成像的特点。本文重点阐述扫描电声显微镜的工作原理、结构和组成、电声显微成像的特点，以及电声成像的基本理论和影响分辨率的主要因素。并显示了扫描电声显微镜在观察功能晶体和陶瓷的电畴结构、金属材料的应力分布、半导体材料的缺陷和位错、MEMS器件的内部信息以及超导陶瓷的相变特性等方面的实际应用。为了和电声成像的实验结果进行比较，本文也介绍了在扫描探针显微镜基础上建立起来的扫描探针声学成像技术在电光陶瓷上的实际应用。

Electron acoustic imaging and applications

Scanning electron acoustic microscope (SEAM) with high sensitivity and powerful ability of imaging processing has been built in our lab. The residual stress distribution in metal Al, the defects and dislocation of semiconductor heterostructure multiplayer GaAs/Si, the domains structure of functional crystal PMN PT, the phase transition of superconductor Bi 2Sr 2CaCu 2O x and the inside numbers of MEMS devices were non destructively observed by SEAM with some advantages over secondary electron imaging. A recent developed near field acoustic method scanning probe acoustic microscope (SPAM) and its application in electrooptical ceramics were also described in this paper.