圆柱度仪测量基准反向法误差分离技术

对大尺寸试件的圆柱度误差的超精测量，仪器的测量基准误差不能忽略，如何分离出基准本身的形状误差及基准之间的位置误差产长期存在的难题。本文首次提出一种可分离出基准间的平行度误差以及直行基准的形状误差的方法，即反向法，从而较圆满地解决了这一问题。利用该方法建立的模型可用于重要试件圆柱度误差的超精测量中，该技术对超精密车床的研制提供了依据。

Error Separating Technique of Measuring Datum of Cylindricity Instrument

The error of measuring datum can not be neglected when the measuring accuracy of specimen is higher.How to separate the form and position error from measuring datum is a difficult problem for a long time. This paperput foward an error separating method which can separate the parallelism error for datum and straightness error ofslideway for the first time. Therefore, that problem is solved perfecily. The model esteblished by the new tecchniquecan be used to super precision measurement of cylindricity error for some important specimen. This technique alsocan be applied to the development of super precision machine tools.