| IBAD薄膜与基体界面的显微结构 |
| |
| 引用本文： | 陶琨,何向军,江海,范玉殿,李恒德. IBAD薄膜与基体界面的显微结构[J]. 材料研究学报, 1996, 10(2): 187-190 |
| |
| 作者姓名： | 陶琨 何向军 江海 范玉殿 李恒德 |
| |
| 作者单位： | 清华大学 |
| |
| 摘 要： | 采用中能离子束辅助沉积（ＩＢＡＤ）技术，在单晶Ａｌ２Ｏ３（０００１）基片上沉积Ｍｏ膜，在ＧＡＡｓ（００１）基片上合成Ｆｅ１６Ｎ２薄膜，用ＨＲＥＭ等研究了Ｍｏｅａｊｄ－Ａｌ２Ｏ３（０００１），Ｆｅ１６ｎ２膜－ＧａＡｓ（００１）界面的显微结构，结果表明：Ｍｏ膜的晶粒呈细小柱状或纤维状，晶粒平均尺寸约８ｎｍ，Ｆｅ１６Ｎ２薄膜为等轴晶，晶粒平均尺寸约为１０ｎｍ，在Ｍｏ膜－Ａｌ２Ｏ３（０００１）界面及Ｆｅ１
|
| 关 键 词： | 离子束辅助沉积 界面 显微结构 薄膜 |
| 收稿时间： | 1996-04-25 |
| 修稿时间： | 1996-04-25 |
INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE |
| |
| TAO Kun,HE Xiangjun,JIANG Hai,FAN Yudian,LI HengdeCorrespondent:. INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE[J]. Chinese Journal of Materials Research, 1996, 10(2): 187-190 |
| |
| Authors: | TAO Kun HE Xiangjun JIANG Hai FAN Yudian LI HengdeCorrespondent: |
| |
| Affiliation: | TAO Kun,HE Xiangjun,JIANG Hai,FAN Yudian,LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering,Tsinghua University,Beijing ) |
| |
| Abstract: | Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the |
| |
| Keywords: | ion-beam assisted deposition (IBAD) interface microstructure |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《材料研究学报》浏览原始摘要信息 |
|
点击此处可从《材料研究学报》下载全文 |
|
