压电陶瓷驱动球基微驱动器的动力学研究

研制出了尺寸为30 mm×30 mm×50 mm的压电陶瓷驱动的球基微驱动器样机,并对该微驱动器进行动力学分析以及微型轴孔装配的实验研究。建立了微驱动器金属球空间坐标关系,分析了球基微驱动器的动力学特征,并建立了其动力学模型。采用龙格-库塔法计算出了微驱动器的动力学参数,并利用MATLAB的SIMULINK模块搭建了微驱动器的仿真模型,并对其进行了动力学仿真分析。研制出了球基微驱动器样机,并在此基础上,集成微夹持器形成微操作器,对微驱动器性能进行了实验测试,并开展了Φ180 μm微型轴与Φ200 μm微型孔之间的精密微装配实验研究。最后,分析了微驱动器金属球质量、驱动信号频率、以及金属球与微驱动单元摩擦块接触表面摩擦系数对其性能的影响。实验结果表明:该球基微驱动器的转动分辨率为0.000 1°,转动定位精度为0.000 5°,微驱动器最大工作频率为1 200 Hz。实验结果验证了逆转振动模型的正确性,由该微驱动器所集成的微操作器,完全可以满足对微小元器件的微米级操作与装配等精密作业的要求。

Dynamical research on spherical micro actuator with PZT drivers

A 30 mm×30 mm×50 mm spherical micro actuator driven by piezoelectric ceramic stacks (PZT) was developed, and the dynamics of the spherical micro actuator was analyzed, the micro assembly between micro shaft and micro spindle sleeve by the micro actuator was researched. First, this paper set up a space coordinate relationship of the spherical micro actuator to analyze dynamical characteristics. Following that, it used the Runge-Kutta arithmetic to calculate the dynamical parameters of the micro actuator and to built a dynamical model to simulate it by the SIMULINK module of MATLAB. After these, a spherical micro actuator experimental sample was developed, and a micromanipulator with a micro-gripper based on the sample spherical micro actuator was integrated, By the micro assembly experimental research between a micro shaft of Φ180 μm and a micro spindle sleeve of Φ200 μm, the characteristics of the spherical micro actuator impacted by the metal sphere mass of the micro actuator, driving signal frequency, friction coefficient of the contact surface between the metal sphere and the friction block of the micro driving unit were analyzed. The experimental results indicate that the rotate resolution, the rotate positioning precision and the maximum working frequency of the micro actuator are 0.000 1°, 0.000 5° and 1 200 Hz,respectively. The experimental results validate the back rotation and vibration model of the spherical micro actuator,it shows that the micromanipulator integrated by the spherical micro actuator can meet requires of precise micro operation and assembly for MEMS or other microelements in micron fields.