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一种全功能2kb E^2PROM的研制
引用本文:于宗光,徐征.一种全功能2kb E^2PROM的研制[J].微电子学,1998,28(6):426-429.
作者姓名:于宗光  徐征
作者单位:华晶电子集团中央研究所
摘    要:论述了E^2PROM的设计技术,包括单元设计,升压电路设计,存储阵列设计等,然后扼要介绍了其工艺过程和关键工艺,最后给出了E^2PROM单元和电路的性能。

关 键 词:E^2PROM  数字集成电路  存储器

Development of a 2 kb Full Featured E 2PROM
YU Zong Guang,XU Zheng,YE Shou Yin,XIA Shu Rong,FU Bin,HUANG Wei and XU Ju Yan Central Research Institute,Huajing Electronics Group Co.,Wuxi,Jiangsu.Development of a 2 kb Full Featured E 2PROM[J].Microelectronics,1998,28(6):426-429.
Authors:YU Zong Guang  XU Zheng  YE Shou Yin  XIA Shu Rong  FU Bin  HUANG Wei and XU Ju Yan Central Research Institute  Huajing Electronics Group Co  Wuxi  Jiangsu
Affiliation:YU Zong Guang,XU Zheng,YE Shou Yin,XIA Shu Rong,FU Bin,HUANG Wei and XU Ju Yan Central Research Institute,Huajing Electronics Group Co.,Wuxi,Jiangsu 214035
Abstract:A 2 kb E 2PROM has been developed.Technologies for designing the cell,the voltage multiplication circuit and memory arrays are discussed.The fabrication process for the device is described,including some critical process steps.Finally,performances of the E 2PROM cell and the circuit of the 2 kb E 2PROM are presented.
Keywords:Digital  IC  Memory  E  2PROM  Cell  EEACC  1265  2570
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