Effect of AlN layer thickness on structure and magnetic properties of FePt/AlN multilayers

FePt (50 nm) and FePt(xnm)/AlN(1, 2, 3 nm)]₁₀ (x=2, 3 nm) films were prepared by RF magnetron sputtering technique, then were annealed at 550 °C for 30 min. This work investigates the effect of AlN layer thickness on structure and magnetic properties of FePt/AlN multilayers. Superlattice (0 0 1) peaks can be found in the grazing incidence X-ray diffraction of FePt and FePt (3 nm)/AlN (1, 2, 3 nm)]₁₀ films, which indicate that the FCC phase has been partially transformed into ordered L1₀ phase. Compared with the single layer FePt film, superlattice (0 0 1) peaks of FePt/AlN multilayers are weak and wide, which indicates that the introducing of AlN hinders the growth of FePt particle, and also shows the introducing of AlN is not beneficial to the transformation from FCC phase to L1₀ phase. In addition, the low-angle XRD spectra show the layered structure of FePt/AlN has been broken after annealing. The coercivities, particle size, intergrain exchange interactions of FePt/AlN films are decreased with increasing AlN layer thickness.