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Particularities of condensation of atoms with increased kinetic energy |
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| Authors: | Leonid R. Shaginyan Jeon Geon Han |
| Affiliation: | a Institute for Materials Science Problems of National Academy of Sciences of Ukraine, Krzhizhanovsky str., 3, Kiev-03142, Ukraine b Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chun-Chun-Dong Jangan-gu Suwon 440-746, Korea |
| Abstract: | Novel universal method for measurement of the condensation coefficient α is developed. Using this method, noticeable difference between measured (α≈0.8) and expected (α≈1) values of the condensation coefficient for sputtered Cr atoms was revealed for the first time. The effect is assumed to be a result of considerable elevation of the surface temperature during atomic condensation induced by the energy delivered to the condensation surface by sputtered atoms and from the plasma. |
| Keywords: | Magnetron sputtering Chromium Condensation coefficient Surface temperature |
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