Sintering and Electrical Properties of Titania- and Zirconia-Containing ln2O3-Sno2(ITO) Ceramics |
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| Authors: | Nicolas Nadaud Monique Nanot Philippe Boch |
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| Affiliation: | Ceramics laboratory, Ecole Supérieure de Physique et de Chimie Industrielles, 75005 Paris, France |
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| Abstract: | The deposition rate and film quality of In2O3-SnO2 (ITO) transparent electrodes processed by sputtering are improved when using dense sputtering targets. Unfortunately, ITO ceramics do not sinter easily. It is shown that addition of TiO2 (<1 wt%) to ITO greatly increases densification without degrading electrical properties of sputtered films. The influence of ZrO2 and SiO2 was also investigated. |
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