| 微齿轮轴的微细电火花加工 |
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| 引用本文： | 褚旭阳,狄士春,王振龙. 微齿轮轴的微细电火花加工[J]. 吉林大学学报(工学版), 2010, 40(6) |
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| 作者姓名： | 褚旭阳 狄士春 王振龙 |
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| 基金项目： | 国家自然科学基金重点项目 |
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| 摘 要： | 采用微细电火花铣削与微细电火花线切割组合加工复杂微小零件。以带轴的微小齿轮为例,在分析其结构特点及微细电加工特性的基础上,规划了微小齿轮轴的组合电加工工艺流程,分析了组合加工中的精度和效率,实现了节圆直径为350μm的微小齿轮轴的制造。
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| 关 键 词： | 微机电系统 微细电火花铣削加工 微细电火花线切割加工 |
Fabrication of micro-gear shaft on micro-EDM |
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| CHU Xu-yang,DI Shi-chun,WANG Zhen-long. Fabrication of micro-gear shaft on micro-EDM[J]. Journal of Jilin University:Eng and Technol Ed, 2010, 40(6) |
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| Authors: | CHU Xu-yang DI Shi-chun WANG Zhen-long |
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| Abstract: | Micro Electrical Discharge Machining(micro-EDM) process and micro Wire Electrical Discharge Machining(micro-WEDM) process have been proven to be appropriate techniques for fabrication of three-dimensional micro parts and high aspect ratio micro structures.The structural feature of micro-gear shaft and the machining characteristics of micro-EDM and micro-WEDM were analyzed in this paper.Then a process flow for fabrication of micro-gear shaft was proposed,which combines micro-EDM and micro-WEDM,and the machining accuracy and efficiency were analyzed.A micro-gear shaft with pith diameter of 350 μm was fabricated by this method. |
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| Keywords: | MEMS Micro-EDM milling Micro-WEDM |
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