电铸工艺对工具电极材料抗电蚀性能的影响研究

提升基于准LIGA工艺制作的微细电火花加工工具电极材料的耐电蚀能力,是准LIGAMicroEDM组合加工高深宽比三维微结构可靠实现的重要研究内容。论述了该组合加工的技术优势及其工艺路线,理论分析了电铸电极材料电蚀性的影响因素,试验研究了电沉积工艺参数和操作条件如添加剂种类及其添加量、电流密度、温度等对电铸铜工具电极电蚀能力的影响。结果表明,组合添加适量明胶和Cl-,在适当的电流密度和温度等工作条件下,电铸出的铜工具电极在微细电火花加工中表现出超强的耐电蚀能力,重量相对损耗为0.3%。

Study on Influence of Electroform Process on Electrical Erosion Resistance of the Tool Electrodes

Improving electrical erosion resistance of tool electrodes microfabricated by LIGA-like technique is the key research task in microfabricating high-aspect-ratio 3D-microstructures combining Quasi-LIGA with Micro-EDM. This paper deals with the technology advantages and process steps, analyzes theoretically the influence factors on electrical erosion resistance of the tool electrodes, and studied experimentally the effect of electro-deposition conditions and process parameters including additives, current density, temperature etc on electrical erosion resistance of the tool electrodes. Research results show that in the given conditions, copper tool electrodes electroformed with appropriate additives of both chlorine and glutin show excellent electrical erosion resistance in the MicroEDM,whose weight relative wear ratio is 0.3 percent.