| 玻璃基板上硅薄膜附着力的研究 |
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| 引用本文： | 朱建强,姜英娜,宋晨路,韩高荣.玻璃基板上硅薄膜附着力的研究[J].玻璃,2005,32(2):3-4,21. |
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| 作者姓名： | 朱建强 姜英娜 宋晨路 韩高荣 |
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| 作者单位： | 威海蓝星玻璃股份有限公司,威海市,264205;浙江大学无机非金属材料研究所,杭州市,310027 |
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| 摘 要： | 采用APCVD工艺,以SiH4为原料在不同温度的玻璃基板上硅质薄膜的制备,采用划痕法测量薄膜与基板之间的附着力,研究了薄膜附着力随基板温度变化趋势.说明了吸附、扩散的增强以及沉积速率的增大等都会导致薄膜附着力的增加.
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| 关 键 词： | 镀膜玻璃 硅薄膜附着力 划痕法 |
| 文章编号： | 1003-1987(2005)02-0003-03 |
INVESTIGATION ON ADHESIVE POWER OF SILICON FILM TO GLASS SUBSTRATE |
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| ZHU Jian-qiang,Jiang Ying-na,Song chen-Lu,HAN Gao-rong.INVESTIGATION ON ADHESIVE POWER OF SILICON FILM TO GLASS SUBSTRATE[J].Class,2005,32(2):3-4,21. |
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| Authors: | ZHU Jian-qiang Jiang Ying-na Song chen-Lu HAN Gao-rong |
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| Abstract: | On different temperature glass substrates silicon film is prepared by APCVD process . SiH4 is used as the starting materials . The adhesive power between silicon film and glass substrate is measured by scratch test . The adhesive power is calculated from the critical load and width of scratch . The change trend of adhesive power with substrate temperature is also investigated . The enhancement of ad sorption . diffusion as well as increment of deposition rate will make film adhere firmlv to its substrate . |
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| Keywords: | coated glass adhesive power scratch test |
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