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一种差动电容式加速度传感器设计的理论研究
引用本文:李恒灿,纪占玲. 一种差动电容式加速度传感器设计的理论研究[J]. 计算机测量与控制, 2011, 19(5)
作者姓名:李恒灿  纪占玲
作者单位:华北水利水电学院,机械学院,河南,郑州,450011
摘    要:设计了一种差动式测振传感器,建立了差动电容式加速度传感器的数学模型,并通过电容的推导计算对其进行了特性分析。对检测电路的结构进行了分析,给出了典型电路结构,推到了电路参数及性能;本设计具有电路结构简单,频率范围宽约0~500Hz,线性度小于1%,灵敏度高,输出稳定,测量误差小等优点;通过实验,各项性能指标满足设计要求。

关 键 词:电容式加速度传感器  差动电容  电路设计  非线性误差  

Study of Theory about Differential Capacitive Acceleration Transducer Design
Li Hengcan,Ji Zhanling. Study of Theory about Differential Capacitive Acceleration Transducer Design[J]. Computer Measurement & Control, 2011, 19(5)
Authors:Li Hengcan  Ji Zhanling
Affiliation:Li Hengcan,Ji Zhanling(School of Mechanical Engineering,North China University of Water Resources and Electric Power,Zhengzhou 450011,China)
Abstract:Designed a inertial vibration sensors.The mathematic model of a differential capacitive acceleration sensor was built up and its characteristic analysis was discussed.The composition of the examinant electric circuit was analyzed.The design has many excellences,such as simple circuit constitution,0~500Hz frequency range,less than 1 percent linearity,high sensitive ability,stability output,little measuring error.Every capability index was examined by experiments and all satisfy the design requirements.
Keywords:capacitive accelerometer  differential capacitance  electric circuit design  nonlinear error  
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