薄膜结构的复合氟离子敏感电极的研究􀀁

复合氟离子敏感电极是用热蒸发的方法在硅基片上制备的。参比电极用热蒸发的银－氟化银薄膜电极，为了提高氯化银薄膜的坚固性和可靠性，又在氯化银表面涂复一层１０００Ａ的含氯离子的有机聚合物薄膜。采用溶胶－凝胶法＾「１，２」制备二氧化硅对电极引线的焊点和器件的侧、背面进行封装，因此这种电极不仅体积小、可靠性高，而且，由于这些薄膜可以在蒸发台内依次完成，减少了污染，适于大规模生产。

Study of a Complex F-Sensitive Electrode withMultilayered Structure by Thermal Evaporation

This electrode was made on silicon substrate with evaporation technique. It is Ag AgCl electrode by thermal evaporation as reference electrode, 1000 A thick containing C1 polymer is pained on the AgCl film, This polymer film ameliorated sturdiness and reliability of the Agcl film. The measurement one used LaF3 as sensitive membrane and high conductive metal fluoride as transitive film. The sealant used silicone oxide membrane by sol-gel for seal ing the solder point of leaders and sides and back of device. So that the complex electrode may be miniaturize and its reliability was improved. The contaminator was reduced and the produc tion on scale is possible, due to these multiple and multipurpose membrane may be made in turn by thermal evaporation.