| 薄膜厚度的多探头计算机实时测控系统 |
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| 引用本文： | 范智勇,陈殿勇,莫晓亮,陈国荣. 薄膜厚度的多探头计算机实时测控系统[J]. 真空科学与技术学报, 2001, 21(2): 166-169 |
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| 作者姓名： | 范智勇 陈殿勇 莫晓亮 陈国荣 |
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| 作者单位： | 复旦大学材料科学系 |
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| 摘 要： | 阐述了用声阻抗法实时监测薄膜沉积的原理，介绍了一种使用个人计算机的实时测控系统。它可在真空镀膜的过程中对膜厚进行实时测量和控制，允许使用多个石英晶体探头，以适应多源共蒸发真空镀膜的需要。监测的过程和结果可以存储下来进行分析。为优化镀膜工艺提供了很大的方便。
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| 关 键 词： | 计算机 薄膜厚度 实时测控 多探头 |
| 文章编号： | 0253-9748(2001)02-0166-04 |
| 修稿时间： | 2000-04-11 |
Real Time In-situ Monitoring and Control of Thin Film Growth with Multi-quartz-probe |
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| Fan Zhiyong,Chen Dianyong,Mo Xiaoliang,Chen Guorong. Real Time In-situ Monitoring and Control of Thin Film Growth with Multi-quartz-probe[J]. JOurnal of Vacuum Science and Technology, 2001, 21(2): 166-169 |
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| Authors: | Fan Zhiyong Chen Dianyong Mo Xiaoliang Chen Guorong |
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| Abstract: | A computerized system has been developed for real time,in situ monitoring and control of thin film growth by deposition.The system can monitor in situ the film thickness because quartz probe is sensitive to properties of the film,such as its acoustic impedance,its density and its thickness etc.Multiple quartz probes can be used for multi source co evaporation.Data accumulated in film growth can be automatically saved for further analysis and for optimization of film growth techniques. |
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| Keywords: | Computer Thin film thickness Real time in-situ monitor Multi-probe |
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