基于超声辅助的UV-LIGA光栅制备技术研究

光栅在通信、光存储及光谱分析领域具有广泛的应用。对超声辅助UV-LIGA技术制备光栅的可行性进行了试验研究。试验中两次利用超声的特殊效应,实现不同的辅助功能。1）采用超声辅助显影,通过改善光刻胶模沟槽内的物质传输,提高光刻胶模结构的显影效率和显影质量。2）在后烘之后、显影之前对光刻胶结构进行超声处理,通过在空气中对光刻胶模结构进行超声处理,有效降低SU-8胶模在电铸过程中的溶胀。选取优化的工艺参数,采用侧向冲液电铸方式,获得了镍基光栅。

Research on Preparation of Gratings Based on Ultrasonic-assisted UV-LIGA

The grating is widely used in the fields of communication,optical storage and spectroscopy. In this paper,the experiment of grating preparation by ultrasonic-assisted UV-LIGA is conducted. Different auxiliary functions are realized by using special ultrasonic effects twice. Firstly,the ultrasonic-assisted process is used to improve the substances transmission in the photoresist mold groove,the developing efficiency and quality. Secondly,the ultrasonic-assisted developing is introduced between the processes of post-baking and developing,and the structure of photoresist mold is subjected to the ultrasonic treatment in the air,then the swelling of plastic mold of SU-8 is reduced evidently in the electroforming process. The process parameters are optimized and the lateral red liquid electroforming way is adopted. Finally,a thickness of 65μm nickel based grating is successfully prepared.