| APC技术在化学机械研磨工艺中的应用 |
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| 引用本文： | 秦彩云,金翠. APC技术在化学机械研磨工艺中的应用[J]. 辽宁化工, 2006, 35(7): 407-409 |
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| 作者姓名： | 秦彩云 金翠 |
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| 作者单位： | 北京石油化工学院信息工程学院,北京,102617 |
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| 摘 要： | 介绍了基于化学机械研磨(CMP)工艺,在Unix和SDT的开发环境下,用VB、C语言在Client和DB(Data Base)之间建立APC SDT Server的方法,以及创建Oracle数据库表的方法,实现了系统用户界面、核心APC Server和数据库表的设计,验证了APC系统的性能
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| 关 键 词： | 化学机械研磨 计算机技术 自动控制 APC系统 |
| 文章编号： | 1004-0935(2006)07-0407-03 |
| 收稿时间： | 2006-03-22 |
| 修稿时间： | 2006-03-22 |
Application of APC Technique in CMP Craft |
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| QIN Cai-yun,JIN Cui. Application of APC Technique in CMP Craft[J]. Liaoning Chemical Industry, 2006, 35(7): 407-409 |
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| Authors: | QIN Cai-yun JIN Cui |
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| Affiliation: | Department of Information Technology, Beijing Institute of Petrochemical Technology, Beijing 102617, China |
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| Abstract: | The technique of CMP was introduced,with the Unix and the SDT development environment,using the VB,the language establish APC SDT Server between client and DB,the Oracle database form was created,user interface was realized,and the system of APC function was verified. |
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| Keywords: | CMP Computer Technology Auto Control APC System |
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