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The use of silver(I)-2-[2-(2-methoxyethoxy)ethoxy]acetate as precursor in the deposition of thin silver layers on float glass by the atmospheric pressure combustion chemical vapor deposition process
Authors:Thomas Struppert
Affiliation:a Technische Universität Chemnitz, Fakultät für Naturwissenschaften, Institut für Chemie, Lehrstuhl für Anorganische Chemie, Straße der Nationen 62, 09111 Chemnitz, Germany
b INNOVENT e.V., Technologieentwicklung Jena, Prüssingstraße 27 B, 07745 Jena, Germany
Abstract:The innovative use of silver(I)-2-2-(2-methoxyethoxy)ethoxy]acetate (AgO2C(CH2OCH2)3H], 3) as precursor for the deposition of silver on float glass by applying the atmospheric pressure combustion chemical vapor deposition process is described. As nucleation layer tungsten oxide was utilized, conformal, closed and dense silver layers of ca. 70 nm thickness were obtained. They are adhesive and high reflective with a resistivity of 5 ? 108 Ωm.
Keywords:Combustion chemical vapor deposition  Silver  Multilayer system  Conductivity  Float glass
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