Synthesis and characterization of platinum thin film as top electrodes for multifunctional layer devices by PLD

Platinum thin films were grown onto (001) oriented SrTiO₃ substrates by means of the pulsed laser deposition technique. Structural and morphological characterizations were performed using XRD and AFM. The influence of substrate temperature and deposition rate was analyzed on the crystallographic properties of the film. As a result, an increment in the crystallinity of the film due to the change on the temperature was observed. On the other hand, Pt films showed a granular morphology and its roughness was related to the fluence and low deposition temperature. Finally their electrical properties were analyzed and discussed as a function of the previous morphological results.