Competitive effects of film thickness and growth rate in spray pyrolytically deposited fluorine-doped tin dioxide films

Here we report efforts to understand the competitive roles of film thickness (up to ∼ 650 nm) and growth rate (up to ∼ 190 nm/min) in spray pyrolytically deposited fluorine-doped tin dioxide films. This was achieved by varying the time of deposition and/or the precursor concentration. Film properties were investigated using X-ray diffraction technique and Hall effect measurements. The thickness evolution involved textured growth along [200] orientation followed by a secondary prominence of [110] and [101] orientations. The growth rate induced effects accelerated this change. The carrier concentration and carrier mobility showed that the [200] oriented growth is technologically advantageous and can be obtained using a wider growth rate range ∼ 50-130 nm/min.