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Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition |
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| Authors: | PL Sun CH Hsu CY Su |
| Affiliation: | a Department of Materials Science and Engineering, Feng Chia University, Taichung 407, Taiwan b Department of Materials Engineering, Tatung University, Taipei 104, Taiwan c Department of Mechanical Engineering, National Taipei University of Technology, Taipei 106, Taiwan |
| Abstract: | In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance. |
| Keywords: | TiAlN CrN Cathodic arc deposition Abrasion Corrosion resistance |
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