Titanium dioxide thin films for high temperature gas sensors

Titanium dioxide (TiO₂) thin film gas sensors were fabricated via the sol-gel method from a starting solution of titanium isopropoxide dissolved in methoxyethanol. Spin coating was used to deposit the sol on electroded aluminum oxide (Al₂O₃) substrates forming a film 1 μm thick. The influence of crystallization temperature and operating temperature on crystalline phase, grain size, electronic conduction activation energy, and gas sensing response toward carbon monoxide (CO) and methane (CH₄) was studied. Pure anatase phase was found with crystallization temperatures up to 800 °C, however, rutile began to form by 900 °C. Grain size increased with increasing calcination temperature. Activation energy was dependent on crystallite size and phase. Sensing response toward CO and CH₄ was dependent on both calcination and operating temperatures. Films crystallized at 650 °C and operated at 450 °C showed the best selectivity toward CO.