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Multi-orientation patterned deposition of BaTiO3 thin films using an Au buffer layer
Authors:Yaodong Yang  Jianjun Yao  Jiefang Li  Jaydip Das  D. Viehland
Affiliation:Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA
Abstract:The control of crystallographic orientation for ferroelectric oxide thin films grown on single crystal substrates has been investigated. We find that perovskite BaTiO3 has unusual orientation distributions when deposited on (100)- and (110)-oriented SrTiO3 single crystal substrates that have predeposited patterned Au regions. BTO areas deposited on gold islands were found to have a (111) orientation, whereas those deposited directly on STO had the same orientation as the substrate. Based on this method, we can select, locate, and pattern an oxide film to have different orientation distributions, and thereby engineer films with the complete property anisotropy in-plane.
Keywords:Patterning   Pulsed laser deposition   Perovskite   Nanoparticles   Scanning electron microscopy   Transmission electron microscopy   X-ray diffraction   Crystallographic orientation
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