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Pulsed laser deposited alumino-silicate thin films and amorphous chalcogenide/alumino-silicate structures
Authors:P. Němec,V. Nazabal,J.-P. Guin,A. Kalendová  ,S. Zhang
Affiliation:
  • a Department of Graphic Arts and Photophysics, Faculty of Chemical Technology, University of Pardubice, Studentská 573, 53210 Pardubice, Czech Republic
  • b Equipe Verres et Céramiques, UMR-CNRS 6226, Sciences Chimiques de Rennes (SCR), Université de Rennes 1, 35042 Rennes Cedex, France
  • c Department of Economy and Management of Chemical and Foodstuff Industries, Faculty of Chemical Technology, University of Pardubice, Stava?ov 97-G, 53210 Pardubice, Czech Republic
  • d LARMAUR ERL-CNRS 6274, Université de Rennes 1, 35042 Rennes Cedex, France
  • e Institute of Chemistry and Technology of Macromolecular Materials, Faculty of Chemical Technology, University of Pardubice, Studentská 573, 53210 Pardubice, Czech Republic
  • f CEMHTI-CNRS, Site Haute Température, Orléans, France
  • g Institute of Applied Physics and Mathematics, Faculty of Chemical Technology, University of Pardubice, Studentská 84, 53210 Pardubice, Czech Republic
  • Abstract:Alumino-silicate coatings and structures formed from alumino-silicate and amorphous chalcogenide submicrometer layers were prepared by pulsed laser deposition. Fabricated thin films were characterized in terms of their structure, morphology, topography, chemical composition, optical properties, and basic anticorrosive functionality. Prepared coatings are amorphous, smooth, without micrometer-sized droplets, with chemical composition close to parent targets. Spectral dependencies of refractive indices and extinction coefficients were derived from variable angle spectroscopic ellipsometry data. Amorphous chalcogenide/alumino-silicate structures present large refractive index differences of individual layers (Δn ~ 1.2 at 1550 nm) which could be useful for optical systems working at infrared telecommunication band wavelengths. Basic anticorrosion data of alumino-silicate layers show promising anticorrosion behavior.
    Keywords:Amorphous materials   Alumino-silicates   Chalcogenide glasses   Optical properties   Pulsed laser deposition   X-ray diffraction   Secondary Ion Mass Spectroscopy
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