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A study of atomic layer deposited LiAlxOy films on Mg-Li alloys
Authors:PC Wang  MC Lin  MJ Chen
Affiliation:a Department of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan
b Department of Materials Science and Engineering, Feng Chia University, Taichung, Taiwan
Abstract:LiAlxOy films with thicknesses of 65-200 nm were deposited by the atomic layer deposition (ALD) technique on the LZ101 Mg-Li alloy. The ALD-deposited LiAlxOy films exhibit an amorphous structure and have an atomic ratios of Li:Al:O = 1:1:2. The potentio-dynamic polarization tests show that the corrosion resistance of Mg-Li alloys can be significantly improved due to the dense and pinhole-free structure as well as the excellent coverage and conformity of the ALD-deposited LiAlxOy films.
Keywords:Atomic layer deposition  LiAlxOy film  Mg-Li alloy  Corrosion resistance
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