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Ni80Fe20/Mo纳米多层膜的互扩散
引用本文:王文雍.Ni80Fe20/Mo纳米多层膜的互扩散[J].功能材料与器件学报,2001,7(1):63-68.
作者姓名:王文雍
作者单位:中国耀华玻璃集团公司,
摘    要:针对Ni80Fe20/Mo纳米多层膜在实际应用中经常面临的热稳定性问题,研究了多层膜在343-683K温度范围内的互扩散行为,测定了其有效互扩散系数Dλ。小的激活焓来源于多层膜中存在的共格应变。当温度低于483K时,NiFe/Mo多层膜具有较强的抵制NiFe和Mo亚层间互扩散能力,这对NiFe/Mo多层膜今后的实际应用有重要意义。

关 键 词:Ni80Fe20/Mo  亚层  激活焓  互扩散关系  多层膜
文章编号:1007-4252(2001)01-0063-06
修稿时间:1999年12月31

Interdiffusion in Ni80Fe20/Mo magnetic multilayers prepared by magnetron sputtering
WANG Wen-yong.Interdiffusion in Ni80Fe20/Mo magnetic multilayers prepared by magnetron sputtering[J].Journal of Functional Materials and Devices,2001,7(1):63-68.
Authors:WANG Wen-yong
Abstract:For improving the thermal stability of magnetic multilayers, the interdiffusion of Ni80Fe20/Mo multilayers between 343~ 683K has been studied by determining the effective interdiffusion coefficient Dλ . The much lower activation enthalpy of diffusion is attributed to the coherence strains existing in the multilayers. As the annealing temperature is below 483K, this result suggests that the Ni80Fe20/Mo multilayers have a strong resistance to the atomic interdiffusion between sublayers. It is signifi-cant to application of NiFe/Mo multilayers.
Keywords:Ni80Fe20/Mo
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